MEMS Vector Hydrophone Structual Error Analysis and Testing

In this paper, we analysis the working principle of a cilium-type MEMS vector hydrophone, by analyzing we obtained the errors of the vector micro-sensor are deviations from column cilium. Since the structure is mainly picking up sound vibrations by the cilium, the piezoresistor which on the beams connected by Wheatstone bridge circuit will output the signals, so the deviation of cilium cylinder have greater impact the sensitivity in both directions of vector hydrophone. Through theoretical calculation and finite element simulation of the sensitive structure of the error analysis. By the structure of the hydrophone error test ,we obtained the sensitivity of X direction is 0.755mv / g, the sensitivity of Y direction is 0.683mv / g, The relative sensitivity error of two directions is 9.5% which is close to the simulation results. Finally, this paper give a solution to the error. (Abstract)