Design of a Single-Plate Electrowetting-on-Dielectric Device

Due to its simple structure, low consumption of energy but strong driving forces, Electrowetting on Dielectric (EWOD) is used most frequently in digital microfluidics for manipulation and control of droplets. In this paper, the internal mechanism of EWOD is explained though establishing the geometric model of unipolar board structure digital microfluidic chip. The digital simulation software COMSOL Multiphysics is applied to analyze the coupling fields. The results show that external flow velocity of micro-droplet is greater than the internal velocity. Based on the theoretic analysis, surface micromachining technologies are employed to fabricate the single-plate EWOD chip. Finally, an experiment platform is set up to test this chip. Experimental results show that 2 mu L droplet can be driven in velocity of 10cm/s and two droplets can be merged successfully. It will possibly provide an effective solution to the manipulation of droplets.