Development of low-pressure calibration system using a pressure balance

A new calibration system for low-pressure is now under development at NMIJ/AIST. The new system is designed to calibrate pressure transducers in the pressure range of less than 10 kPa in absolute mode. The pressure generation technique needs only a single pressure balance and the pressure in the bell-jar is used as a calibration pressure instead of the system pressure. In this paper, the outline of the calibration system and the measurement results are described. (C) 2011 Elsevier Ltd. All rights reserved.