Decrease of FIB-induced lateral damage for diamond tool used in nano cutting

Wei Wu,Zongwei Xu,Fengzhou Fang, Bing Liu, Yinjing Xiao,Jinping Chen,Xibin Wang,Hongzhong Liu

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2014）

引用 30|浏览13

暂无评分

摘要

•We mainly aim to characterize and decrease the FIB-induced damage on diamond tool.•Raman and XPS methods were used to characterize the nanoscale FIB-induced damage.•Lower energy FIB can effectively lessen the FIB-induced damage on diamond tool.•The diamond tools’ performance was greatly improved after FIB process optimization.•6nm chip thickness of copper was achieved by diamond tool with 22nm edge radius.

查看译文

关键词

Ion implantation,Nano cutting,Nanometric cutting edge,Focused ion beam,Minimum thickness of cut

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要