Formation of ion beam with high current density for micro irradiation techniques

The paper describes a study of the ion beam formation for irradiation of microareas of construction materials with individual grains. A numerical simulation of the microbeam formation was performed with profiles of current density distribution close to rectangular to obtain uniform dose. Ion beams with the total current on the target 10–100nA were considered. An approach for beam focusing with energy variation without moving a sample was considered. The ability to create current density distributions close to uniform in the target plane was experimentally validated.