Investigation of various phases of Fe–Si structures formed in Si by low energy Fe ion implantation

The compositional phases of ion beam synthesized Fe–Si structures at two high fluences (0.50×1017atoms/cm2 and 2.16×1017atoms/cm2) were analyzed using X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). The distribution of Fe implanted in Si was simulated using a dynamic simulation code (TRIDYN) incorporating target sputtering effects. The Fe depth profiles in the Si matrix were confirmed with Rutherford backscattering spectrometry (RBS) and XPS depth profiling using Ar-ion etching. Based on XPS binding energy shift and spectral asymmetry, the distribution of stable Fe–Si phases in the substrate was analyzed as a function of depth. Results indicate Fe implantation with a fluence of 0.50×1017atoms/cm2 and subsequent thermal annealing produce mainly the β-FeSi2 phase in the whole thickness of the implanted region. But for the samples with a higher fluence Fe implantation, multiple phases are formed. Significant amount of Fe3Si phase are found at depth intervals of 14nm and 28nm from the surface. Initially, as-implanted samples show amorphous Fe3Si formation and further thermal annealing at 500°C for 60min formed crystalline Fe3Si structures at the same depth intervals. In addition, thermal annealing at 800°C for 60min restructures the Fe3Si clusters to form FeSi2 and FeSi phases.