Micro-beam and pulsed laser beam techniques for the micro-fabrication of diamond surface and bulk structures

S Sciortino,Marco Bellini,Federico Bosia,Silvia Calusi,Chiara Corsi, C Czelusniak,N Gelli,L Giuntini,Federico A Gorelli,Stefano Lagomarsino,P A Mando,Mirko Massi,P Olivero,G Parrini,M Santoro,Andrea Sordini,A Sytchkova,F Taccetti,Maurizio Vannoni

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2015）

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摘要

Micro-fabrication in diamond is applicable in a wide set of emerging technologies, exploiting the exceptional characteristics of diamond for application in bio-physics, photonics and radiation detection. Micro ion-beam irradiation and pulsed laser irradiation are complementary techniques, which permit the implementation of complex geometries, by modification and functionalization of surface and/or bulk material, modifying the optical, electrical and mechanical characteristics of the material.

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关键词

Diamond,Ion beam modification,Pulsed laser writing,Detectors

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