Simultaneous measurement of Young's modulus and Poisson's ratio at microscale with two-modes scanning microdeformation microscopy

In this paper, we present a technique to simultaneously measure Young's modulus E and Poisson's ratio v of an isotropic material at local scale in a single experiment. Using several flexural modes of vibration of the scanning microdeformation microscope, it is possible to decouple the contributions of E and v from the first two resonant frequencies, thereby providing access to both the elastic parameters. The proposed approach is applied to SU8 thin films deposited on silicon substrates and provides values consistent with those from the literature. (C) 2011 Elsevier B.V. All rights reserved.