Design of a Topology Nano-Positioning Stage

Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro-technology equipment and manufacture. This paper presents a one-dimensional positioning system, adopting a PZT piezoelectric ceramic nano-positioning stage designed by multi-objective topological optimal synthesis. In order to obtain better performance, wedge-shaped structure has been applied as a precise pretension for the piezoelectric ceramic. Through finite element simulation and experimental verification, better static performance and smaller kinetic coupling are achieved, with up to 10 mu m stroke displacement output and 5 nm resolution. This stage provides a novel, flexible, and efficient way in the design and optimization of the nano-positioning system.