3D Active Edge Silicon Sensors: Device Processing, Yield and Qa for the Atlas-Ibl Production
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT（2013）
Key words
3D silicon sensor,ATLAS Insertable B-Layer,IBL,LHC upgrade,FE-I4,Pixels,Radiation hardness
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