Low Temperature Growth of Piezoelectric Films by RF Reactive Planar Magnetron Sputtering Takafumi Oda,Akira Kawabata, Kazushige Harada,Tadashi Shiosaki,Takashi YamamotoJapanese Journal of Applied Physics(2014)引用 2|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要