TiInZnO/Ag/TiInZnO multilayer films for transparent conducting electrodes of dye-sensitized solar cells

TI-In Zn-O (TIZO) and TIZO/Ag/TIZO multilayer transparent films were prepared at room temperature on glass substrates using an RF/DC magnetron sputtering system. The optical and electrical properties of the multilayer structures were examined according to the thickness of each TIZO/Ag/TIZO layer. A transparent and conductive film with a sheet resistance of 11.1 Omega/rectangle and a transmittance of 86.9% at 550 nm (94.2%, normalized to the glass substrate) was obtained at a TIZO/Ag/TIZO thickness of 100/8/42 nm. The TIZO and TIZO/Ag/TIZO multilayer films exhibited higher mechanical resistances against an increasing load of external scratches than the indium tin oxide (ITO) film. Overall, the properties of the TIZO/Ag/TIZO multilayer films were comparable or superior to those of the ITO/Ag/ITO multilayer. The deposited TIZO/Ag/TIZO multilayer films were used in the fabrication of dye-sensitized solar cells (DSSCs) as the transparent electrode. The TIZO/Ag/TIZO multilayer-based DSSCs exhibited a short circuit photocurrent density of 9.4 mA/cm(2), a photocurrent of 613 mV, and an overall cell efficiency of 3.1% at a light intensity of one tun. (C) 2014 The Japan Society of Applied Physics