Electron Spin Resonance Of Chromium-Platinum Pair In Silicon

We have investigated a chromium-platinum pair in silicon by electron spin resonance measurement. A new ESR spectrum originating from a chromium-platinum pair has been detected in both n- and p-type silicons diffused with chromium and platinum. The anisotropic g-tensor obtained by analyzing the angular dependence of the ESR spectrum shows a monoclinic (C(1h)) symmetry with g-values of g(1) = 4.67, g(2) = 2.99, and g(3) = 1.80. The g(1) axis is along the (110) direction. The g(2) and g(3) axes are perpendicular to the g(1) axis, and the g(2) axis is rotated from the (100) direction to the (111) direction at an angle of 20 degrees. The anisotropic character of monoclinic (C(1h)) symmetry results from the nearest-neighbor configuration consisting of a Pt atom at a substitutional site distorted by the displacement of Pt along the (100) direction and a Cr atom at the nearest-neighbor interstitial site. The ESR measurement under illumination suggests that a chromium-platinum pair forms a donor like electron trap level. (C) 2011 The Japan Society of Applied Physics