High aspect ratio micro-hole filling employing emulsified supercritical CO 2 electrolytes

Chengyu Li,Junjie Yang,Wenta Tsai,Changjian Lin,Tsofu Mark Chang,Masato Sone

The Journal of Supercritical Fluids（2016）

引用 8|浏览11

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摘要

•Electrodeposition processes for metal filling into micro-hole are compared.•Super-filling can be achieved by employing a supercritical carbon dioxide bath.•The advantages of supercritical carbon dioxide bath are addressed and discussed.•The effects of wettability and deposition rate are discussed.

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关键词

High aspect ratio micro-hole,Supercritical carbon dioxide,Electrodeposition,NiP alloy

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