High aspect ratio micro-hole filling employing emulsified supercritical CO 2 electrolytes
The Journal of Supercritical Fluids(2016)
摘要
•Electrodeposition processes for metal filling into micro-hole are compared.•Super-filling can be achieved by employing a supercritical carbon dioxide bath.•The advantages of supercritical carbon dioxide bath are addressed and discussed.•The effects of wettability and deposition rate are discussed.
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关键词
High aspect ratio micro-hole,Supercritical carbon dioxide,Electrodeposition,NiP alloy
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