Synthesis of WN(NMe2)3 as a Precursor for the Deposition of WNx Nanospheres

The WNx precursor WN(NMe2)3 was prepared from WN(OtBu)3 and Zr(NMe2)4 by using an amide/alkoxide exchange reaction. Structural analysis of WN(NMe2)3 revealed an overall pseudo-tetrahedral geometry with a distortion towards trigonal pyramidal. Aerosol-assisted chemical vapor deposition (AACVD) from WN(NMe2)3 resulted in deposition of WNx nanospheres onto Si(100) and Si(111) substrates at low temperatures (75125 degrees C). The nanospheres were imaged by SEM and characterized by using energy dispersive spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS). These preliminary results demonstrate the viability of WN(NMe2)3 as a single-source precursor for the deposition of WNx at low temperature.