Multilayered Monolithic Silicon Photonic Crystals

Shrestha Basu Mallick,Il Woong Jung,Aaron M Meisner,J Provine,Roger T Howe,Olav Solgaard

IEEE Photonics Technology Letters（2011）

Cited 7|Views7

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Abstract

In this letter, we describe the fabrication of double-layered self-aligned silicon photonic crystals (PCs) using directional and isotropic etches. The double-layer PCs represent a step towards practical 3-D PCs based on standard Si processing, and they have several advantageous characteristics compared to single-layer PCs, including higher reflectivity and sharper resonances, as demonstrated both ...

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Key words

Reflectivity,Silicon,Photonic crystals,Fabrication,Three dimensional displays,Broadband communication,Lattices

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