Multilayered Monolithic Silicon Photonic Crystals
IEEE Photonics Technology Letters(2011)
Abstract
In this letter, we describe the fabrication of double-layered self-aligned silicon photonic crystals (PCs) using directional and isotropic etches. The double-layer PCs represent a step towards practical 3-D PCs based on standard Si processing, and they have several advantageous characteristics compared to single-layer PCs, including higher reflectivity and sharper resonances, as demonstrated both ...
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Key words
Reflectivity,Silicon,Photonic crystals,Fabrication,Three dimensional displays,Broadband communication,Lattices
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