The dielectric response of low-k interlayer dielectric material characterized by electron energy loss spectroscopy
Microporous and Mesoporous Materials(2014)
摘要
•The effect of porosity on the electronic structure of materials has been examined.•We examined the impact of doping and porosity in terms of dielectric function.•We presented a robust method for electronic band structure calculation through EELS.•Both theoretical and experimental studies were performed to verify the results.
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关键词
Low-k materials,Porosity,EELS,Kramers–Kronig relations,Dielectric function
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