Theoretical and experimental investigation of the trapped air effect on air-sealed capacitive pressure sensor
Sensors and Actuators A: Physical(2015)
摘要
•Theoretical model of the sensor considering the trapped air behavior is formulated.•Sensor sensitivity is significantly affected by the trapped air in the cavity.•Sensitivity improved more than 15 times by employing additional air chamber.•Pressure sensitivity of 8986ppm/kPa is obtained experimentally.
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关键词
Air-sealed pressure sensors,Capacitive sensors,LC resonance,Pressure sensitivity,Wireless sensing
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