Miniature silicon Michelson interferometer characterization for dimensional metrology

•We manufacture two interferometry silicon microprobes for dimensional measurement.•We developed a new ultra-high precision test bench traceable to the meter definition.•Two optical connection configurations of the micro-probes are proposed.•Evaluation of the stability and the residuals errors of the two optical micro-probes.•The micro-probe with the reflectance-transmittance ratio of 25–75% presents residual errors less than 5nm.