Innovative CVD synthesis of Cu2O catalysts for CO oxidation

•Pure Cu2O films were deposited at 250°C using a direct chemical vapor deposition method•The effect of water addition in the liquid feedstock of Cu(acac)2 and ethanol on the physicochemical properties and catalytic performance was investigated•The synthesized Cu2O leads the complete oxidation of CO at 175°C for Cu2O prepared with 5vol.% of water with good reusability and reproducibility•The enhanced activity is discussed regarding the crystallite grain size, optical property, lattice/adsorbed oxygen and the embedded geometry geometry.