Precision UV imprinting system for parallel fabrication of large-area micro-lens arrays on non-planar surfaces
Precision Engineering(2016)
Abstract
•A new vacuum-assisted UV imprinting system for precision parallel fabrication of microlens arrays on nonplanar substrates—a new low-cost platform for forming 3-dimensional micro-structures on nonplanar surfaces.•The imprinting system precisely controls an elastomeric mold (PDMS) through pressure, which enables direct formation of large-area high quality microlens arrays onto a convex dome.•The surface profile and roughness of the microlenses were measured (∼λ/50) and proved to be comparable with the high cost conventional precision processes, e.g., laser lithographic fabrication.•Imaging experiments were performed to assess the resolution and large view-angle imaging capability of the micro-lens array.
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Key words
Vacuum-assisted imprinting,UV imprint,Artificial compound eye,Nonplanar surface
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