Application of Ellipsometry to Control the Plasmachemical Synthesis of Thin TiONx Layers
ADVANCES IN CONDENSED MATTER PHYSICS(2015)
Abstract
Ellipsometry is often used to determine the characteristics of films. Ellipsometric studies may turn out to be ineffective because several solutions correspond to the same polarization angles. It is demonstrated that the ambiguity is not due to the physical limitations of the method but it has a purely mathematical character. So, additional information about the film is necessary to determine the absolute values of refractive index, attenuation, and thickness.
MoreTranslated text
Key words
plasmachemical synthesis,ellipsometry
AI Read Science
Must-Reading Tree
Example
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined