Fabrication and application of stainless steel stamps for the preparation of microfluidic devices
Microelectronic Engineering(2014)
Abstract
•New procedure for the manufacture of stainless steel stamps is presented.•The procedure combines UV-lithography, gold electroplating, and electropolishing.•It is suitable for the fabrication of masters for roll-to-roll imprinting.•The imprints were used for the preparation of functional microchips.
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Key words
Stainless steel stamp,Roll-to-roll master,Roll-to-roll stamp,Microfluidic devices fabrication,Electropolishing
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