Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe films

•The NiGe films with various C doses was investigated systematically.•The incorporation of C effectively improves the thermal stability of NiGe.•The presence of C also changes the preferred orientations of NiGe.•C distributes homogeneously within NiGe and segregates at NiGe/Ge interface.•This distribution of C accounts for the improved thermal stability of NiGe.