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Anti-sticking layers for nickel-based nanoreplication tools

Celestino Padeste,Sandro Bellini,Dorota Siewert,Helmut Schift

Microelectronic Engineering（2014）

Cited 6|Views6
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Abstract
Graphical abstractDisplay Omitted HighlightsReliable anti-sticking coatings on nickel surfaces are produced based on perfluoro-alkyl phosphates and -phosphonates.Oxygen plasma pre-treatment yields ...
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Key words
Fluorinated alkyl monolayers,Anti-sticking layers,Nanoimprint lithography,Injection molding,Adhesion,Demolding
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