Lift-off patterning of multi-walled carbon nanotube and PEDOT:PSS composite films with fluorinated polymer templates

•The patterning method of MWCNT is defined by PFDMA mask in a lift-off process.•Finely defined lines were observed at the edge of the patterned MWCNT films.•PEDOT:PSS, a conducting polymer, does not react with the patterned PFDMA.•MWCNT/PEDOT:PSS films were improved the sheet resistance compared to MWCNT films.•The optimal coating volume of MWCNT/PEDOT:PSS was examined to achieve fine patterns.