Effect of Nitrogen Passivation on the Performance of MIM Capacitors With a Crystalline- $\hbox{TiO}_{2}/\hbox{SiO}_{2}$ Stacked Insulator
IEEE Electron Device Letters（2012）
关键词
atomic force microscopy,thin films,nitrogen,capacitors,thermal treatment,leakage current,heat treatment,atomic force microscope,passivation,grain boundary,grain boundaries,crystallisation
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要