Single-Structure Micromachined Three-Axis Gyroscope With Reduced Drive-Force Coupling
IEEE Electron Device Letters(2015)
摘要
This letter presents a micromachined silicon three-axis gyroscope based on a triple tuning-fork structure utilizing a single vibrating element. The mechanical approach proposed in this letter uses a secondary “auxiliary” mass rather than a major “proof” mass to induce motion in the proof mass frame for Coriolis force coupling to the sense mode. These auxiliary masses reduce the unwanted mechanical...
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关键词
Gyroscopes,Couplings,Force,Electrodes,Micromechanical devices,Temperature sensors
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