The Perfect Cut: Focused Ion Beam Preparation for In Situ TEM

Microscopy and Microanalysis(2015)

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摘要
In situ TEM techniques have improved considerably in recent years with respect to their ability to understand materials behavior with high temporal and spatial resolution. While significant advances have been made in elucidating atomic-scale mechanisms that control properties of materials for a wide range of applications, geometric compromises made to accommodate in situ TEM experiments could play a detrimental role in the ability to apply data to “real-life” structures or devices.
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关键词
focused ion beam preparation,ion beam,situ tem
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