Quick response PZT/P(VDF-TrFE) composite film pyroelectric infrared sensor with patterned polyimide thermal isolation layer

Infrared Physics & Technology(2014)

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摘要
•A single element infrared sensor using PZT/P(VDF-TrFE) composite thick film, with polyimide thermal insulation layer and thermal insulation tanks fabricated by laser micro-etching, were fabricated.•The detectivity (D*) of the sensor was 1.9 ×108 cm Hz1/2 W−1 at 137.3 Hz modulation frequency and the thermal time constant of the infrared sensor τT was about 15 ms.•The sensor show high detectivity and short response time, which is an essential advantage in infrared detectors and some other devices.
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关键词
Infrared sensor,PZT/P(VDF-TrFE),Laser etching,Thermal isolation
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