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Heteroleptic titanium alkoxides as single-source precursors for MOCVD of micro-structured TiO2

Sobia Ashraf,Helen C. Aspinall,John Bacsa,Paul R. Chalker,Hywel O. Davies,Anthony C. Jones,Paul O’Brien,Jacqueline S. Wrench

Polyhedron（2015）

Cited 3|Views17
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Abstract
Heterolepetic titanium alkoxides with donor-functionalized ligands show greatly modified behaviour as precursors for MOCVD of TiO2 compared with their homoleptic analogues with monodentate ligands. [Ti(OPri)2(OCH2CH2NMe2)2] is found to be a highly effective single-source precursor for MOCVD of micro structured anatase.
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Key words
TiO2,Microstructure,MOCVD,Precursor,Alkoxide
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