Development of a Roll Press UV Imprint Process for Replication of Microstructures on a Large and Thin Quartz Substrate

Motonori Okubo, Yutaka Tsutsui,Kentaro Ishibashi,Ligyi Li,Shuichi Shoji,Jun Mizuno, Masuni Yanagisawa

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY(2012)

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Abstract
In this study, fabrication of microstructures was carried out using newly developed UV imprinting system named "Roller Press Scan (R)" for large-area replication. Micro lens arrays were replicated using two types of UV resins and molds, onto quartz substrates. Microstructures have been replicated in uniform and have been confirmed high-throughput productivity.
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Key words
Microstructure,quartz substrate,UV imprinting,Roller Press Scan
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