55.4: Invited Paper: Development of Highly Productive In‐line Vacuum Evaporation System for OLED Lighting

Gen5 OLED lighting panel manufacturing in-line vacuum system has been developed using a unique linear organic source which enables high efficiency in process performance and its productivity. The system can provide the full coverage solution for the purpose of OLED lighting devices regardless of number of layers and junctions to be needed. The performance of system are as follows: a) Film thickness uniformity of +/- 1.3% (organic) b) Film thickness uniformity of less than +/-3.4% (metal) c) Continuous evaporation with no stop: more than 300 hours d) Utilization efficiency of organic material: larger than 60% under Ultimate 1minute TACT