Improvement of Reliability of SOI Electrostatic Tilt Mirror by Using Landing Island StructureKeiji Isamoto,Masataka Tei,Hiroyuki Fujita,Hiroshi ToshiyoshiIEEJ Transactions on Sensors and Micromachines(2011)引用 2|浏览2AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要