NIST high throughput variable kinetic energy hard X-ray photoelectron spectroscopy facility

C Weiland,Abdul K Rumaiz,P S Lysaght,B A Karlin,J C Woicik, Daniel A Fischer

Journal of Electron Spectroscopy and Related Phenomena（2013）

引用 15|浏览12

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摘要

•High throughput HAPXES beamline provides beam energies between 2.1 and 6keV.•Recent results in depth profiling of materials for next-generation CMOS.•Facility ideal or measurement of energy level alignment at buried interfaces.•Approved beamline NSLS II will provide wider energy range and X-ray flux.

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关键词

HAXPES,Photoelectron spectroscopy,Synchrotron techniques

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