Fabrication of a 3D electrically small antenna using holographic photolithography.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING(2013)

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摘要
We describe the novel fabrication of a 3D electrical small antenna and its subsequent characterization. The patterning of meander lines conformed onto a hemispherical substrate is achieved by 3D holographic photolithography, which uses time-division multiplexing of a series of iteratively optimized computer-generated holograms. The meander lines have a line width of 100 mu m and line separation of 400 mu m, with a line pitch of 500 mu m and a total meander length of 145 mm. The working frequency is found to be 2.06 GHz, with an efficiency of 46%. This work demonstrates a new method for the fabrication of 3D conformal antennas.
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optics,quantum optics,lasers
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