Dissociative electron attachment to titatinum tetrachloride and titanium tetraisopropoxide

Here we present a dissociative electron attachment study of titanium tetrachloride and titanium tetraisopropoxide in the incident electron energy range from about 0–18 eV. The results are compared to electron impact ionization and fragmentation of these compounds and discussed in relation to the role of secondary electrons in focused electron beam induced deposition. We also use the opportunity and describe in detail a recently constructed crossed beam apparatus for the study of the energy dependency of ion formation in low energy electron interaction with gas phase molecules.