Microstructural and elasto-plastic material parameters identification by inverse finite elements method of Ti (1 − x) Al x N (0<x<1) sputtered thin films from Berkovich nano-indentation experiments
Thin Solid Films（2014）
摘要
The mechanical properties of Ti(1−x)AlxN (0 and high speed steel substrates have been investigated. The as-deposited coatings have been characterized by X-ray diffraction, atomic force microscopy, four-probe electric resistivity method, mechanical deflection of cantilever beams and Berkovich nano-indentation tests associated with inverse finite elements analysis. The coatings with x<0.58–0.59 present a cubic structure whereas for x>0.7 a hexagonal structure is observed. Between these two compositions cubic and hexagonal structures coexist. The roughness depends on the film thickness and on the Al content and a minimum associated to a very fine microstructure is clearly observed in the two-phase coatings. The electric resistivity sharply increases as soon as the hcp structure appears (x~0.6). The mean residual stresses are compressive, except for the AlN coating, and present a minimum at the neighborhood of x~0.64 where a mixed structure is observed.
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关键词
Nitride films,Nano-indentation,Residual stress,Inverse method,Identifiability,Finite elements,Fracture toughness
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