Printed Barium Strontium Titanate capacitors on silicon

In this paper, we show that Barium Strontium Titanate (BST) films can be prepared by inkjet printing of sol-gel precursors on platinized silicon substrate. Moreover, a functional variable capacitor working in the GHz range has been made without any lithography or etching steps. Finally, this technology requires 40 times less precursors than the standard sol-gel spin-coating technique. (C) 2015 Elsevier B.V. All rights reserved.