Development Of A Transparent Optical Telescope For The Absolute Positioning With Respect To A Reference Laser Beam
LASER METROLOGY AND INSPECTION(1999)
摘要
We have developed an optical system which permits the absolute positioning of an element with respect to a reference laser beam. The resolution is of the order of 10 mu m in translation and 50 mu rad in rotation. It is highly transparent (>90%) permitting several elements to be aligned. A calibration procedure has also been studied in order to be independent of internal deformations.
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关键词
alignment, CCD, transparent position sensor, absolute positioning, pigtail laser
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