Experimental assessment of machining accuracy obtainable by femtosecond-laser surface structuring

T Hoeche,Tino Petsch, David Ruthe,Klauspeter Zimmer,Frank Syrowatka,Frank Heyroth

PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)（2003）

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摘要

Surface replica films taken from fs-laser machined silicon wafers coated with a 20 nm thick layer of nickel are analysed in an environmental scanning electron microscope. Electron-probe microanalysis on the replica film is used to assess the spatial distribution and elemental composition of debris.

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关键词

femtosecond laser,micromachining,debris distribution,replica

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