Shaping light with MOEMS

W Noell,Stefan Weber,J F Masson,Jerome Extermann,Luigi Bonacina,A Bich,R A Bitterli,H P Herzig,D Kiselev,T Scharf,Reinhard Voelkel,K J Weible,J P Wolf,N F De Rooij

Proceedings of SPIE（2011）

Cited 2|Views16

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Abstract

Shaping light with microtechnology components has been possible for many years. The Texas Instruments digital micromirror device (DMD) and all types of adaptive optics systems are very sophisticated tools, well established and widely used. Here we present, however, two very dedicated systems, where one is an extremely simple MEMS-based tunable diffuser, while the second device is complex micromirror array with new capabilities for femtosecond laser pulse shaping. Showing the two systems right next to each other demonstrates the vast options and versatility of MOEMS for shaping light in the space and time domain.

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Key words

Dynamic linear diffuser,membrane,magnetic actuator,MEMS fs-laser pulse shaping,micromirror array,vertical comb-drive,MOEMS

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