Epitaxial Growth Of Germanium On Silicon For Light Emitters
INTERNATIONAL JOURNAL OF PHOTOENERGY(2012)
Abstract
This paper describes the role of Ge as an enabler for light emitters on a Si platform. In spite of the large lattice mismatch of similar to 4.2% between Ge and Si, high-quality Ge layers can be epitaxially grown on Si by ultrahigh-vacuum chemical vapor deposition. Applications of the Ge layers to near-infrared light emitters with various structures are reviewed, including the tensile-strained Ge epilayer, the Ge epilayer with a delta-doping SiGe layer, and the Ge/SiGe multiple quantum wells on Si. The fundamentals of photoluminescence physics in the different Ge structures are discussed briefly.
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