A Biocompatible Low Temperature Co-Fired Ceramic Substrate For Biosensors

Low temperature co-fired ceramics (LTCC) are widely utilized in the fabrication of compact, three dimensional, and highly integrated microelectronic components. Typical applications include military and mobile electronics applications requiring custom, hermetic, and/or high reliability packaging. These characteristics make LTCC attractive for use in microfluidic and biomedical application. However, commercial LTCC systems are not designed for biomedical applications and have unknown cytocompatibility. In the current work, an LTCC tape has been developed starting with materials of known composition and biocompatibility, a commercially available lime silicate glass and alumina. Tapes achieve high density for sintering temperatures compatible with LTCC processing (850更多