Computer analysis of the AFM images of the nanopore system on the SiO 2 /Si structure surface, obtained by Zn ion implantation
Bulletin of The Russian Academy of Sciences: Physics(2014)
Abstract
A computer study of morphological characteristics using AFM images of a self-organized surface nanopore system in the structure of SiO 2 /Si(100) is performed. The nanopore system is obtained via Zn ion doping with subsequent thermal annealing. AFM images of the nanopore system are studied using the STIMAN 3D software. A correct quantitative estimate is made of the morphology of this nanopore system using a number of parameters (equivalent diameter, area, total area, and shape coefficient). Estimating the morphology of the self-organized surface nanopore system in the structure of SiO 2 /Si(100) allows us to narrow the possible practical applications of the resulting system in opto- and nanoelectronics.
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Key words
Atomic Force Microscopy, Atomic Force Microscopy Image, Equivalent Diameter, Shape Coefficient, Subsequent Thermal Annealing
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