From crater eruption to surface purification of raw silicon: A treatment by pulsed electron beam

Yunying Gao,Ying Qin,Chuang Dong, Guangzhi Li

Applied Surface Science(2014)

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摘要
•The crater eruptions show effective removal of impurities in raw silicon.•The crater morphologies of multi-point eruptions are different from the metal's.•The red shifts from Raman spectra are attributed to the impurities re-dissolution.•The sublayer melting and eruption mechanism are supported by the simulation.
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关键词
Silicon,High-current pulsed electron beam,Crater morphologies,Thermal field simulation,Raman shifts
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