Surface modification by metal ion implantation forming metallic nanoparticles in an insulating matrix

Applied Surface Science(2014)

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摘要
•Metal nanoparticles can be produced through metallic ion implantation in insulating substrate, where the implanted metal self-assembles into nanoparticles.•The nanoparticles nucleate near the maximum of the implantation depth profile, that can be estimated by computer simulation using the TRIDYN.•Nanocomposites, obtained by this way, can be produced in different insulator materials. More specifically we have studied Au/PMMA (polymethylmethacrylate), Pt/PMMA, Ti/alumina and Au/alumina systems.•The nanocomposites were characterized by measuring the resistivity of the composite layer as function of the dose implanted, reaching the percolation threshold.•Excellent agreement was found between the experimental results and the predictions of the theory.
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关键词
Surface modification,Nanocomposites,Nanoparticles,Ion implantation
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