Enhanced nano-mechanical and wear properties of polycarbosilane derived SiC coating on silicon

Jonaki Mukherjee, Sujan Ghosh,Arnab Ghosh,Ashok Ranjan,A K Saxena,P Das,Rajat Banerjee

Applied Surface Science（2015）

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摘要

•Moderately higher temperature of β-SiC and α-SiC deposition using polycarbosilane.•Enhancement of nano-mechanical properties with deposition temperature.•Enhanced wear resistance SiC coating for protection against harsh environment.

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关键词

Polycarbosilane,SiC,Nanoindentation,Scratch

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