Hierarchical micro/nanostructures generated by femtosecond laser beams modified through a liquid-crystal spatial light modulator

•The hierarchical micro/nanostructures inside various shapes can be created using a femtosecond laser machining system with a liquid-crystal spatial light modulator.•Hierarchical micro/nanostructures are composed of micro-sized valley structures of 30μm spacing and nanostrucutres with a periodicity of approximately 400nm.•The orientation of the inner valley structures in the produced hierarchical micro/nanostructures can be selected by changing the azimuth of the pattern beams in the focal plane.