Nanomechanical Properties of Atomic Layer Deposition Sb2Te3 Thin Films

The nanomechanical and structural properties of Antimony Telluride (Sb2Te3) thin films deposited by atomic layer deposition were investigated and reported. X-ray diffraction analysis, scanning electron microscopy (SEM) with energy dispersive X-ray spectroscopy analysis (EDS), atomic force microscopy (AFM) and were employed to characterize the Sb2Te3 single film composition. Nanoindentation was used to investigate the nanomechanical properties of the films. A Nanoindenter XP equipped with a DCM II head was used in conjunction with the continuous stiffness method (CSM) in depth and load control modes to evaluate the hardness and modulus of the Sb2Te3 thin films. In addition the influence of the ALD fabrication parameters on the mechanical and structural properties are reported.